Introduction of porous ceramic vacuum chuck
Suntech’s porous ceramic vacuum chuck has below advantages:
1.High porosity: An important feature of porous ceramics is that they have more uniform and controllable pores. The pores are divided into open pores and closed pores. The open pores have the functions of filtering, absorbing, adsorbing, and eliminating echoes, while the closed pores are beneficial for blocking heat insulation, sound, and liquid and solid particles.
2.Physical and chemical properties are stable: Porous ceramic materials can withstand acid and alkali corrosion, can withstand high temperature and high pressure, have good clean state and will not cause secondary pollution. It is a green and environmentally friendly functional material.
3.High strength & without dust pollution: The porous ceramic material is generally obtained by high-temperature sintering of metal oxide, silicon dioxide, silicon carbide, etc. These materials have high strength, and the boundary portion of the raw material particles melts and bonds during the sintering process, forming a high strength ceramic.
4.Lightweight: A large number of uniform micro-pores are distributed inside the porous ceramics, and the specific gravity of the ceramics is about 1.1-2.5g/cm3, which is lightweight compared with the metal adsorption platform;
5.Insulation and anti-static: Porous ceramics generally choose alumina or silicon carbide ceramics, which are insulating materials. When an appropriate amount of conductive agent are added into the ceramic, static electricity can be effectively eliminated;
6.Customizable: Vacuum chuck with different sizes, shapes, bases, ceramic porosity and hole sizes can be provided by Suntech. The micro-pores size is in the range of 15-100μm and the porosity is in the range of 30-70%;
Application of porous ceramic vacuum chuck:
Ceramic vacuum chuck module can be used for wafer heating, wafer transfer, wafer cutting, wafer grinding, wafer cleaning, laser cutting, screen printing and other processes.
Product Parameter:
|
Material |
Silicon carbide |
Aluminum oxide |
|
Flatness |
0.002-0.005 |
0.002-0.005 |
|
Aperture |
10-100μm |
10-100μm |
|
porosity /% |
30-60 |
30-70 |
|
Bulk density/g/cm3 |
1.1-2.3 |
1.1-2.5 |
|
Flexural strength/MPa |
20-70 |
30-80 |
|
Resistivity（Ω·m） |
108-1011 |
108-1011 |
|
Color |
azure |
Yellow, black, white |
|
Shape |
Circular, square or Customization |
Circular, square or Customization |
